Microfabrication and Growth Techniques

This hands-on course will teach students tools for the design of micro and nanostructured optical elements and devices. Students will learn aspects of computational design of optical elements, microfabrication and testing. The course will consist of three consecutive modules: 1) Device design with Lumerical and Zemax, 2) Techniques for micro and nanofabrication, including photolithography, e-beam lithography, thin-film growth (e-beam and thermal evaporation, sputtering, plasma enhanced chemical vapor deposition, atomic layer deposition), and dry andwet etching. 3) Experimental characterization of the fabricated devices in a photonics lab environment.

Fall, Spring